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使用Luyor紫外线灯的检查半导体设备部件颗粒物

发布时间: 作者:上海路阳仪器 技术文档组 点击次数:
本篇摘要

上海路阳仪器Luyor紫外线灯用于半导体设备部件颗粒物检查,通过荧光激发法识别微小颗粒污染,保障洁净生产环境。

使用Luyor紫外线灯检测人眼不可见的小至30μm的颗粒,并防止洁净室中的污染。无论您使用何种清洁方法来清洁加工后的塑料或金属零件免受污染,您都需要验证零件是否清洁。

如果用紫外线检查清洁的零件,您将检测到人眼无法看到的污染。通过在质量流程中添加紫外线检查,您可以确保清洁的零件交付给您的客户。

Clean Room Applications Using Luyor Ultra Violet Lights

Use Luyor Ultra Violet Lamps to detect particles as small as 30 μm that are not visible to the human eye and prevent contamination in the clean room.

Regardless of what cleaning methods you use to clean your machined plastic or metal parts from contamination, you need to validate that the part is clean. If inspecting the cleaned parts with Ultra Violet light, you will detect contamination that is not possible to see with the human eye. By adding UV inspection to your quality process you ensure that clean parts are delivered to your customer.

  1. 机械部件 machined castings
  2. 清洗 cleaning in baths or tanks
  3. 用紫外线灯检查 inspection with uv light
  4. 在洁净室内包装 packaging in clean room, cross flow cabinet or equal

对污染敏感的产品必须在经过认证的洁净室或清洁的环境中组装。至关重要的是,零件在进入组件之前必须保持清洁。在进入洁净室之前,用紫外线照射零件可以降低污染的风险。

Products sensitive to contamination must be assembled in a certified clean room or in a clean environment. It is of utter importance that the parts are clean prior to entering the assembly. Illuminating the parts with Ultra Violet light prior to entering the clean room decreases the risk of contamination.

进厂零部件 incoming parts
用吸尘器或湿巾清洁 cleaning with vacuum cleaner and wipes
用紫外线灯检查 inspection with uv light
零件进入洁净室进行组装 parts enter clean room for final assembly

如果你的装配过程不在洁净室操作,那么横流柜可能会非常高效。机柜保持空气清洁,确保装配过程安全。但是,进入机柜时,零件需要清洁。通过在机柜内用紫外线检查灯检查零件,您可以确保零件在组装前是干净的。

If your assembly process doesn't include the use of a classified clean room, a Cross Flow cabinet could be very efficient. The cabinet keeps the air clean and the assembly process secured. However, the parts need to be clean when entering the cabinet. By inspecting the parts with Ultra Violet light inside the cabinet you ensure that the parts are clean prior to being assembled.

检查步骤:

进厂零部件 incoming parts
用吸尘器和湿巾清洁零件 clean parts with vacuum cleaner and wipes
零件进入横流柜 parts enter cross flow cabinet
在横流柜中使用紫外线和组装进行检查 inspection with uv light and assembly in cross flow cabinet

使用Luyor紫外线灯的检查半导体设备部件颗粒物(pic1)

用于半导体行业的紫外线检查灯主要有:

产品型号应用场景
详见产品选型资料
引用本文

上海路阳仪器有限公司. 《使用Luyor紫外线灯的检查半导体设备部件颗粒物》[EB/OL]. 上海路阳仪器有限公司, 2024-09-27. https://www.luyor.net/case/CleanRoom-Applications-Using-UltraViolet-Lights.html.

上海路阳仪器有限公司

成立于 2005 年,专注紫外光源、荧光检测与紫外辐照设备的研发制造,产品覆盖荧光渗透/磁粉探伤灯、荧光检漏套装、生物膜检测灯、细胞光毒性辐照仪、荧光蛋白激发光源与转速测量仪器,服务无损检测、轨道交通、食品药品、化妆品与生命科学研究等领域。本文由路阳技术文档组依据产品实测数据与行业标准编写。

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